IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP
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IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP
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| Genre | |
|---|---|
| Other Titles |
RTP Advanced thermal processing of semiconductors Rapid Thermal Processing Proceedings of the IEEE International Conference on Advanced Thermal Processing of Semiconductors |
| Language |
English |
| Item Description |
Title from PDF of title page (viewed August 10, 2004). |
| Publisher |
Piscataway, N.J. :
IEEE,
©2002-
|
| Classification | |
| Dewey Classification |
537.622 |
| Subjects | |
| Subseries |
2009 17th International Conference on Advanced Thermal Processing of Semiconductors 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) |
| Additional form |
1944-0251 |
| Publish date |
10th (Sept. 25-27, 2002)- |
| Publication Frequency |
Annual |
| ISSN |
1944-026X |
| Source of Acquisition |
IEEE 445 Hoes Ln., Piscataway, NJ 08854 |
| Get full text | |