IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council
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IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council
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| Language |
English |
|---|---|
| Item Description |
Refereed/Peer-reviewed |
| Publisher |
New York, N.Y. :
Institute of Electrical and Electronics Engineers
|
| Classification | |
| Dewey Classification |
621 621.3815/2 |
| Subjects | |
| Additional form |
0894-6507 |
| Publish date |
Print began with v. 1, no. 1 (Feb. 1988) |
| Publication Frequency |
Quarterly |
| ISSN |
1558-2345 |
| Source of Acquisition |
IEEE Service Center, 445 Hoes Lane, PO Box 1331, Piscataway, NJ 08855-1331 |
| Get full text | |